|
 |
 |
|
|
| Overview |
|
The small cleanroom footprint and the fully automatic substrate handling as well as the state of the art operating and data preparation software will convince you of the excellence of the SB250 Series being part of the coherent toolset Vistec is offering to its customers from the industry and applied research sector.
The field-proven VSB (Variable-Shaped- Beam), “Write-on-the-fly” and Vector Scan writing modes as well as the 50keV shaped-beam column are further highlights of the new SB250 Series.
|
|
| |
| Key Features |
|
 |
To meet the specific requirements of our customers the following features are optionally available:
|
|
|
|
Various substrate sizes and types supported by fully automatic substrate handling |
|
|
|
Multipass writing |
|
|
|
Layout data preparation station covering up to 32+2 CPUs for:
- fracturing
- plus additional Proximity Effect Correction (PROXECCO) and fogging correction options |
|
|
|
Graphical User Interface (GUI) compliant to SEMI E95 |
|
|
|
| |
| Detailed Description |
|
The small cleanroom footprint and the fully automatic substrate handling as well as the state of the art operating and data preparation software will convince you of the excellence of the SB250 Series being part of the coherent toolset Vistec is offering to its customers from the industry and applied research sector.
The field-proven VSB (Variable-Shaped- Beam), “Write-on-the-fly” and Vector Scan writing modes as well as the 50keV shaped-beam column are further highlights of the new SB250 Series. |
|
| |
| http://lithogroup.vistec-semi.com |
| |
/5A93A1EC5430BC38C1257138003AF435/$FILE/SB250_prod_b_kg.jpg','PicturePopUp','scrollbars=no,status=no,width=650,height=500' ); void(0))