Vistec SB3050 Series
Vistec SB3050
Overview
The Vistec SB3050 Series combines state of the art substrate handling with a high-precision stage system and a sophisti­cated electron-optical 50 keV column specifically developed to guarantee the excellent resolution performance you need for your challenging applications.

Thanks to the production-compatible Graphical User Interface (GUI) the Vistec SB3050 can be easily integrated into automated production environments (CIM). Being capable of exposing both masks (including templates) and wafers, the SB3050 exposure tools are the ideal bridge to next generation technology nodes.
 
Key Features
50keV high-resolution electron optics with 1nm writing/address grid
310x310mm˛ stage travel range to ensure full 300mm wafer exposure capability
High throughput achieved by the “write-on-the-fly” principle combined with Flexible Stage Speed (FSS)
State of the art fully automatic substrate handling with mini environment to satisfy the requirements of most advanced resist technologies
Wafer Mix & Match with optical lithography supported by production compatible correction methods
Integrated monitoring software for all critical process parameters
High speed data processing allows fast data generation including flexible Proximity Effect Correction with distributed computing
Small cleanroom footprint < 27m˛
Cell Projection option for combined use with VSB principle for further throughput improvement
 
Detailed Description
The Vistec SB3050 Series combines state of the art substrate handling with a high-precision stage system and a sophisti­cated electron-optical 50 keV column specifically developed to guarantee the excellent resolution performance you need for your challenging applications.

Thanks to the production-compatible Graphical User Interface (GUI) the Vistec SB3050 can be easily integrated into automated production environments (CIM). Being capable of exposing both masks (including templates) and wafers, the SB3050 exposure tools are the ideal bridge to next generation technology nodes.
 
http://lithogroup.vistec-semi.com